Inventors:
Akio Kaneko - Fishkill NY, US
Seiji Inumiya - Kanagawa, JP
Tomonori Aoyama - Kanagawa, JP
Takuya Kobayashi - Kanagawa, JP
Assignee:
Kabushiki Kaisha Toshiba - Tokyo
International Classification:
H01L 21/336
H01L 21/8234
US Classification:
438198, 438197, 438482, 438486, 438788, 257E21297, 257E21412, 257E21379, 257E29003
Abstract:
A method of fabricating a semiconductor device according to one embodiment includes: forming a SiGe crystal layer on a semiconductor substrate, the SiGe crystal layer having a first plane and a second plane inclined with respect to the first plane; forming an amorphous Si film on the SiGe crystal layer; crystallizing a portion located adjacent to the first and second planes of the amorphous Si film by applying heat treatment using the first and second planes of the SiGe crystal layer as a seed, thereby forming a Si crystal layer; selectively removing or thinning a portion of the amorphous Si film that is not crystallized by the heat treatment; applying oxidation treatment to a surface of the Si crystal layer, thereby forming a gate insulating film on the surface of the Si crystal layer; and forming a gate electrode on the gate insulating film.