US Patent:
20130241762, Sep 19, 2013
Inventors:
- Chiyoda-ku, JP
Alexander Cooper - Belmont CA, US
Eric Peter Goodwin - Tucson AZ, US
Yuichi Takigawa - Kawasaki, JP
Alec Robertson - Palo Alto CA, US
Assignee:
Nikon Corporation - Chiyoda-ku
International Classification:
G02B 26/10
G01S 13/86
G01B 11/24
G01C 3/08
US Classification:
342 54, 356 401, 35613904, 3591971, 3592051, 3592091, 3592011, 356601, 3592121, 3592012, 356445
Abstract:
A light beam is scanned, for use in laser radar and other uses, by an optical system of which an example includes a beam-shaping optical system that includes a first movable optical element and a second movable optical element. The first optical element forms and directs an optical beam along a nominal propagation axis from the beam-shaping optical system to a target, and the second optical element includes a respective actuator by which the second optical element is movable relative to the first optical element. A controller is coupled at least to the actuator of the second optical element and is configured to induce motion, by the actuator, of the second optical element to move the optical beam, as incident on the target, relative to the nominal propagation axis.