Inventors:
John T. Lileck - Tamaqua PA
John Papinsick - Summit Hill PA
Edward J. Steigerwalt - Lehighton PA
Assignee:
Air Products & Chemicals, Inc. - Allentown PA
International Classification:
C01B 2152
Abstract:
This invention relates to a process for purifying a nitrogen trifluoride containing atmosphere contaminated with dinitrogen difluoride. The atmosphere is purified by heating the nitrogen trifluoride atmosphere in the presence of a particulate metal capable of defluorinating dinitrogen difluoride, but inert to nitrogen trifluoride, preferably the metal being selected from the group consisting of iron, cobalt, and nickel, to a temperature of from about 300. degree. -1000. degree. F. for a time sufficient to effect defluorination of the dinitrogen difluoride.