Inventors:
Elroy C. Smith - La Habra CA
Shi K. Yao - Anaheim CA
Assignee:
Rockwell International Corporation - El Segundo CA
International Classification:
C23C 1500
Abstract:
Deposition of ordered polycrystalline films of zinc oxide and other materials having a strongly preferred crystal growth direction and a high degree of symmetry about the preferred direction is achieved consistently by disposing a charged electrode in a sputtering chamber to limit bombardment of the film and underlying substrate by charged particles.
